JPH024980B2 - - Google Patents
Info
- Publication number
- JPH024980B2 JPH024980B2 JP9484781A JP9484781A JPH024980B2 JP H024980 B2 JPH024980 B2 JP H024980B2 JP 9484781 A JP9484781 A JP 9484781A JP 9484781 A JP9484781 A JP 9484781A JP H024980 B2 JPH024980 B2 JP H024980B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- ion pump
- cathode
- sputter
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 30
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 12
- 238000005315 distribution function Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 239000010406 cathode material Substances 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9484781A JPS57210554A (en) | 1981-06-19 | 1981-06-19 | Triple-pole type ion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9484781A JPS57210554A (en) | 1981-06-19 | 1981-06-19 | Triple-pole type ion pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57210554A JPS57210554A (en) | 1982-12-24 |
| JPH024980B2 true JPH024980B2 (en]) | 1990-01-31 |
Family
ID=14121417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9484781A Granted JPS57210554A (en) | 1981-06-19 | 1981-06-19 | Triple-pole type ion pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57210554A (en]) |
-
1981
- 1981-06-19 JP JP9484781A patent/JPS57210554A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57210554A (en) | 1982-12-24 |
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